Study of Neon-Argon Plasma for metastable states and electron temperature measurement

Abstract

The behavior of neon-argon intensity of the selected emission spectral lines is measured using Optical Emission Spectroscopy (OES). The intensity of spectral lines of neon is 640.2 nm which shows a decreasing trend when the fraction of argon is added. The intensity of spectral line of argon is 811.2nm shows increasing trend when the concentration of neon is added in argon. The second step of this research work is to investigate the effect of Argon fraction variation on Neon discharges. The experiment was performed for the different pressures 2 Pa, 6 Pa, 12 Pa while RF power is varied from 5 watt to 100 watt with an increment of 5 watt. The argon concentration within the neon discharges for each power and pressure varies from 0 to 100 % with an increment of 20 %. It is observed that measured electron temperature (𝑇𝑒) and excitation temperature (𝑇𝑒𝑥𝑐) shows a decreasing trend with an increase in RF power and argon concentration due to the ionization cross-section atoms of ionization potential.